Sens Actuat A (2007) Eom K.pdf

Sens Actuat A (2007) Eom K.pdf

6 Pages · 2006 · 667 KB ·

solution for Eq. (1) provides the resonant frequencies fi of the microcantilevers. of protein molecules based on statistical physics theory. His current 

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Please cite this article in press as: DW Chun et al, Detection of the Au thinlayer in the Hz per picogram regime based on the microcantilevers, Sens Actuators A: Phys (2006), doi:101016/jsna200609013 ARTICLE IN PRESS +ModelSNA5559; No of Pages 6 Sensors and Actuators A xxx (2006) xxx–xxx Detection of the Au thinlayer in the Hz per picogram regime based on the microcantilevers Dong Won Chun a,b , Kyo Seon Hwang a, Kilho Eom a, Jeong Hoon Lee c, Byung Hak Cha a, Woo Young Lee b, Dae Sung Yoon a,∗ , Tae Song Kim a,∗∗ aMicrosystem Research Center, Korea Institute of Science and Technology (KIST), 391 Haweolgogdong, Seongbukgu, Seoul 136761, Republic of Korea bDepartment of Materials Science and Engineering, Yonsei University, 134 Sinchondong, Sedaemungu, Seoul 120749, Republic of Korea cMIT Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA 02139, United States Received 29 May 2006; received in revised form 14 September 2006; accepted 22 September 2006 Abstract Through the use of oscillating microcantilevers, a micromechanical mass detection with a resolution of a Hz per picogram regime is reported Through MEMS processes, piezoelectric microcantilevers that are simultaneously capable of selfactuation and the electrical measurement of resonant frequencies were fabricated Mass detection in the Hz per picogram regime is demonstrated with a deposition of an Au thinlayer, of which the thickness is precisely controlled In addition, it is shown that a scaling down of the microcantilevers enhances the sensitivity during the micromechanical mass detection © 2006 Elsevier BV All rights reserved Keywords:Microcantilever; Micromechanical mass detection; Analytical sensitivity; Resonant frequency 1 Introduction Microcantilevers have played an important role in both MEMS and bioMEMS In particular, recent studies suggest that microcantilevers have a great potential as biosensors for the labelfree detection of biomolecules related to specic dis eases[1,2] The microcantilevers allow a labelfree detection of biomolecules such as prostate specic antigen (PSA) or myo globin by measuring the deection change and/or resonant fre quency shift driven by biomolecular interactions on the micro cantilever surface[1,3,4] Furthermore, the microcantilever can be used as a nanomechanical sensor for detecting nanoparti cles[5,6]and/or a molecular layer[7–10]by measuring the deection change and/or resonant frequency shift induced by the adsorption of the molecular layer on the microcantilever surface ∗Corresponding author Tel: +82 2 958 6944; fax: +82 2 958 6910∗∗Corresponding author Tel: +82 2 958 5564; fax: +82 2 958 6910 Email addresses:[email protected](DS Yoon),[email protected] (TS Kim) The principle for a labelfree detection with microcantilevers is that the molecular adsorption on the microcantilever surface generates a exural rigidity change and also affects the mass of a microcantilever so as to alter the deection and/or the reso nant frequency Staticmode microcantilevers are capable of a labelfree detection by measuring static deection, while oscil lating microcantilevers utilize the resonant frequency shift for a labelfree detection For staticmode microcantilevers[1,3,11], an optical apparatus is required to measure the deection, caus ing difculty in miniaturization Further, if the deection due to molecular adsorption is exceedingly small, difculties may arise while measuring the deection change at a low biomolecule concentration with the optical apparatus For conventional oscil lating microcantilevers, required is an external actuator, thus miniaturization is not likely possible However, a recent work by the authors investigated oscillating piezoelectric microcan tilevers that did not require an external actuator or optical apparatus Consequently, the microcantilevers developed in that study may be more appropriate for miniaturized sensor appli cations[12–14] In particular, these microcantilevers employ piezoelectric and converse piezoelectric effects, enabling selfactuation and an electric measurement of the resonant frequencies 09244247/$ – see front matter © 2006 Elsevier BV All rights reserved doi:101016/jsna200609013 Please cite this article in press as: DW Chun et al, Detection of the Au thinlayer in the Hz per picogram regime based on the microcantilevers, Sens Actuators A: Phys (2006), doi:101016/jsna200609013 ARTICLE IN PRESS +ModelSNA5559; No of Pages 6 2DW Chun et al / Sensors and Actuators A xxx (2006) xxx–xxx Recently, several cases of biomolecule detections using a piezoelectric cantilever have been reported Biomolecule detec tion was accomplished by monitoring the resonant frequency shift of a piezoelectric cantilever over time In a biomolecular interaction, the resonant frequency

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